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ABBOUD , Ali

Last name: ABBOUD

First name: Ali

May 2023 (v1)

Journal article

Metadata-only

Performance improvement with non-alloyed ohmic contacts technology on AlGaN/GaN High Electron Mobility Transistors on 6H-SiC substrate

Lesecq, Marie Fouzi, Yassine Abboud, Ali

ABSTRACT In this paper, non-alloyed ohmic contacts regrown by molecular beam epitaxy (MBE) are fabricated on AlGaN/ GaN high-electron-mobility transistors on 6H-SiC substrate. Low ohmic contact resistance of 0.13 Ω.mm is obtained. This paper demonstrates the high frequency and high power performance improvements thanks to this technology...

Uploaded on: April 30, 2023