A systematic study of TiO2 films deposited by dc filtered cathodic vacuum arc (FCVA) was carried out by varying the deposition parameters in a reactive oxygen atmosphere. The influence of the oxygen partial pressure on film properties is analyzed. Composition was obtained by Rutherford backscattering spectroscopy (RBS) measurements, which also...
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June 14, 2023 (v1)PublicationUploaded on: June 15, 2023
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June 9, 2023 (v1)Publication
The durability of two solar-selective aluminium titanium oxynitride multilayer coatings was studied under conditions simulating realistic operation of central receiver power plants. The coatings were deposited by cathodic vacuum arc applying an optimized design concept for complete solar-selective coating (SSC) stacks. Compositional, structural...
Uploaded on: June 10, 2023 -
June 13, 2023 (v1)Publication
The optimum reflection of the solar spectrum at well-defined incident directions as well as its durability in time are, both, fundamental requirements of the optics of thermosolar and photovoltaic energy conversion systems. The stringent high performance needed for these applications implies that, almost exclusively, second face mirrors based...
Uploaded on: June 15, 2023 -
June 13, 2023 (v1)Publication
The deposition of SiOx (x < 2) compound thin films by the reactive magnetron sputtering technique at oblique angles is studied from both theoretical and experimental points of view. A simple mathematical formula that links the film stoichiometry and the deposition conditions is deduced. Numerous experiments have been carried out to test this...
Uploaded on: June 15, 2023 -
June 13, 2023 (v1)Publication
Target poisoning in reactive magnetron sputtering deposition of thin films is an undesired phenomenon, well known for causing a drastic fall of the process efficiency. We demonstrate that when this technique is operated at oblique angles, films with composition raging from pure metallic to stoichiometric compound can be grown in non-poisoned...
Uploaded on: June 15, 2023