Ti–Si–C–ON films were deposited by DC reactive magnetron sputtering using different partial pressure ratio of oxygen (pO2) and nitrogen (pN2). Compositional analysis revealed the existence of three different growth zones for the films; (I) N/Ti = 2.1 (high atomic ratio) and low oxygen content; (II) 0.76 < N/Ti < 2.1 (intermediate atomic ratio)...
-
June 26, 2023 (v1)PublicationUploaded on: June 27, 2023
-
June 22, 2023 (v1)Publication
Ti–Si–C–ON films were deposited by DC reactive magnetron sputtering and their chemical properties, biofilm formation and toxicity were characterized. Based on the films composition three different growth regimes were identified on the films; (I) N/Ti = 2.11 (high atomic ratio) and low oxygen content; (II) 0.77 ≤ N/Ti ≤ 1.86 (intermediate atomic...
Uploaded on: June 23, 2023 -
June 23, 2023 (v1)Publication
Detailed structural, microstructural, biofilm formation and cytotoxicity studies were performed on Ti–Si–C–ON hard coatings prepared by DC reactive magnetron sputtering, in order to evaluate the relation among these properties. Compositional analysis showed the existence of two distinct regimens; regime I: high C/Si atomic ratio (C/Si ≥ 1.42)...
Uploaded on: June 24, 2023