July 4, 2023 (v1)
Publication
Intrinsic stress in amorphous hydrogenated carbon (a-C:H) coatings was reduced through addition of 10–20 sccm N2 to the feed gas. The compressive stresses observed in this study were in the range −0.91 to −1.6 GPa. Approximately 2–3 at.% nitrogen was incorporated into the coatings as determined using elastic recoil detection (ERD). Raman...
Uploaded on: July 5, 2023