A

V

AVRAMOVIC , Vanessa

Last name: AVRAMOVIC

First name: Vanessa

January 2023 (v1)

Journal article

Metadata-only

Fabrication, and direct current and cryogenic analysis of SF6-treated AlGaN/GaN Schottky barrier diodes

Fornasiero, Quentin Defrance, Nicolas Lepilliet, Sylvie

Schottky contacts on fluorine implanted AlGaN/GaN heterostructures with the ideality factor close to unity and low on-voltage threshold are presented in this paper. An SF 6 plasma anode pretreatment followed by a specific low-temperature annealing is also compared to a nonannealed sample. In addition, physical-model parameters are extracted by...

Uploaded on: February 22, 2023