BAGOLINI A.

This paper deals with the manipulation of micro-objects operated by a new concept multi-hinge multi-DoF (degree of freedom) microsystem. The system is composed of a planar 3-DoF microstage and of a set of one-DoF microgrippers, and it is arranged is such a way as to allow any microgripper to crawl over the stage. As a result, the optimal...

This paper presents both an experimental and a numerical study concerning the mechanical response of a silicon microgripper with bidirectional electrostatic actuation to externally applied excitations. The experimental set-up is composed of a probe station equipped with mobile probes that apply contact forces. This part of the investigation...

In the last decades, microelectromechanical systems have been increasing their number of degrees of freedom and their structural complexity. Hence, most recently designed MEMSs have required higher mobility than in the past and higher structural strength and stability. In some applications, device thickness increased up to the order of tens (or...