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BAHETTE , Emilie

Last name: BAHETTE

First name: Emilie

December 2015 (v1)

Journal article

Metadata-only

Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate

Khazaka, Rami Bahette, Emilie Portail, Marc

The cubic polytype of silicon carbide is an interesting candidate for Micro-Electro-Mechanical-Systems (MEMS) applications due to its tremendous physico-chemical properties. The recent development of multi-stacked Si/SiC heterostructures has demonstrated the possibility to obtain a (110)-oriented 3C–SiC membrane on a 3C–SiC pseudo-substrate,...

Uploaded on: December 4, 2022