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BAUER , Ph.

Last name: BAUER

First name: Ph.

June 23, 2023 (v1)

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Impact of the particles impingement on the electronic conductivity of Al doped ZnO films grown by reactive magnetron sputtering

Jullien, M. Horwat, D. Endrino, José Luis

Aluminium doped zinc oxide thin films (4 at.% Al) were deposited by reactive magnetron sputtering technique and characterized by X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS), four point probe technique and optical spectrophotometry. High heterogeneities were observed as a function of sample position in the chamber. The...

Uploaded on: June 24, 2023
June 21, 2023 (v1)

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Influence of the nanoscale structural features on the properties and electronic structure of Al-doped ZnO thin films: An X-ray absorption study

Jullien, M. Horwat, D. Manzeh, F.

Transparent Al-doped ZnO thin films were deposited by reactive magnetron sputtering with different oxygen flow rates. The electronic resistivity, measured by the 4 point-probe method, is very sensitive to the sample position relative to the magnetron axis: the closer the magnetron from the axis the higher the resistivity. This is more...

Uploaded on: June 23, 2023