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BOGAN , Justin

Last name: BOGAN

First name: Justin

September 16, 2021 (v1)

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Chemical and structural investigation of the role of both Mn and Mn oxide in the formation of manganese silicate barrier layers on SiO2

Casey, Patrick Bogan, Justin Lozano Suárez, Juan Gabriel

In this study, Mn silicate (MnSiO3) barrier layers were formed on thermally grown SiO2 using both metallic Mn and oxidized Mn films, in order to investigate the role of oxygen in determining the extent of the interaction between the deposited Mn and the SiO2 substrate. Using x-ray photoelectron spectroscopy, it has been shown that a metallic Mn...

Uploaded on: December 4, 2022
September 30, 2021 (v1)

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Chemical and structural investigations of the interactions of Cu with MnSiO3 diffusion barrier layers

Casey, Patrick Bogan, Justin Mccoy, Anthony P.

X-ray photoelectron spectroscopy (XPS) has been used to investigate the thermodynamic stability of Cu layers deposited onto Mn silicate (MnSiO3) barrier layers formed on SiO2 surfaces. Using a fully in situ growth and analysis experimental procedure, it has been shown that 1nm Cu layers do not chemically react with ultra thin ( 2.6 nm) MnSiO3...

Uploaded on: March 25, 2023