CABALLERO HERNÁNDEZ , Jaime

Nanoporous coatings are well known to be of technological interest for different areas of application, especially in the field of semiconductors, microelectronics, electrode materials for batteries, fuel cells, supercapacitors, and optical devices. In this sense research efforts have been focused on the synthesis and characterization of new...

A broad interest has been showed recently on the study of nanostructuring of thin films and surfaces obtained by low‐energy He plasma treatments and He incorporation via magnetron sputtering. In this paper spatially resolved electron energy‐loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM) is used to locate and...

A broad interest has been showed recently on the study of nanostructuring of thin films and surfaces obtained by low‐energy He plasma treatments and He incorporation via magnetron sputtering. In this paper spatially resolved electron energy‐loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM) is used to locate and...

In this work, we present our magnetron sputtering based methodology to produce amorphous silicon coatings with closed porosity, as a strategy to fabricate solid helium targets, in the form of supported or self-supported thin films, for nuclear reactions. We show how by changing the He working pressure it is possible to obtain highly porous...

Blanco sólido de gases nobles para reacciones nucleares. Constituye un objeto de la presente invención un blanco sólido de gases nobles para reacciones nucleares que comprende una película porosa de un material que se selecciona entre silicio, cobre, cobalto, titanio, aluminio o wolframio, la cual contiene en sus poros un gas que se selecciona...

The formation of the porous structure in dc magnetron sputtered amorphous silicon thin films at low temperatures is studied when using helium and/or argon as the processing gas. In each case, a-Si thin films were simultaneously grown at two different locations in the reactor which led to the assembly of different porous structures. The set of...

A new approach is presented to produce amorphous porous silicon coatings (a-pSi) with closed porosity by magnetron sputtering of a silicon target. It is shown how the use of He as the process gas at moderated power (50-150 W RF) promotes the formation of closed nanometric pores during the growth of the silicon films. The use of oblique-angle...

Quantification of light elements content in thin films is an important and difficult issue in many technological fields such as polymeric functional thin films, organic thin film devices, biomaterials, and doped semiconducting structures. Light elements are difficult to detect with techniques based on X-ray emission, such as energy dispersive...

Sputtering of silicon in a Helium magnetron discharge has been reported as a bottom-up procedure to obtain amorphous Si films containing high amounts of gas-filled nanopores. Here we compare the microstructure and composition of Si–He nanocomposite films deposited by magnetron sputtering (MS) with 4He in DC or RF and 3He in RF operation modes....