March 2016 (v1)
Journal article
A micro-electro-mechanical systems fabrication process has been developed to create self-assembled on-chip high efficiency antennas. The self-assembly creates out-of-plane antenna structures, which can have good radiation efficiency on low resistivity substrates. The structural material is SU-8 and the self-assembly curvatures are defined...
Uploaded on: February 28, 2023