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HOLGADO , J.p.

Last name: HOLGADO

First name: J.p.

July 5, 2023 (v1)

Publication

Metadata-only

Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

Holgado, J.P. Escobar-Galindo, Ramón Veen, A. van

Two sets of ZrO2 thin films have been prepared at room temperature by ion beam induced chemical vapour deposition and subsequently annealed up to 1323 K. The two sets of samples have been prepared by using either O2+ or mixtures of (O2++Ar+) ions for the decomposition of a volatile metallorganic precursor of zirconium. The structure and...

Uploaded on: July 7, 2023