LUNGWITZ , Frank

A systematic study of TiO2 films deposited by dc filtered cathodic vacuum arc (FCVA) was carried out by varying the deposition parameters in a reactive oxygen atmosphere. The influence of the oxygen partial pressure on film properties is analyzed. Composition was obtained by Rutherford backscattering spectroscopy (RBS) measurements, which also...

In situ Rutherford backscattering spectrometry (RBS) and spectroscopic ellipsometry (SE) were applied to study the compositional and optical stability of a WAlSiN-based solar-selective coating (SSC) at high temperatures in vacuum. The samples were exposed to heating-cooling cycles between quasi room temperature and stepwiseincreased high...

Aluminium titanium oxynitrides were studied as candidate materials for high temperature absorbers in solar selective coatings due to their excellent stability and their tuneable optical behaviour. A set of individual AlyTi1−y(OxN1−x) layers with different oxygen content was prepared by cathodic vacuum arc (CVA) deposition. The composition,...

The durability of two solar-selective aluminium titanium oxynitride multilayer coatings was studied under conditions simulating realistic operation of central receiver power plants. The coatings were deposited by cathodic vacuum arc applying an optimized design concept for complete solar-selective coating (SSC) stacks. Compositional, structural...

A new cluster tool for in situ real-time processing and depth-resolved compositional, structural and optical characterization of thin films at temperatures from −100 to 800 °C is described. The implemented techniques comprise magnetron sputtering, ion irradiation, Rutherford backscattering spectrometry, Raman spectroscopy, and spectroscopic...