June 21, 2023 (v1)
Publication
Transparent Al-doped ZnO thin films were deposited by reactive magnetron sputtering with different oxygen flow rates. The electronic resistivity, measured by the 4 point-probe method, is very sensitive to the sample position relative to the magnetron axis: the closer the magnetron from the axis the higher the resistivity. This is more...
Uploaded on: June 23, 2023