M
J
Last name: MICHAUD
First name: Jean-François
International audience
Gas sensors are devices that can detect and/or discriminate gases in their surroundings. Some of these devices are based on vibrating structure covered with a coating sensitive to the species to detect. But such a layer can cause device failures issues like ageing, low reliability and high response time. Nonetheless, gas sensors are of...
Among the different silicon carbide polytypes, 3C–SiC is very interesting for Micro-Electro-MechanicalSystems (MEMS) applications. This interest could benefit from the development of multi stacked Si/SiC heterostructures as illustrated by the achievement of a continuous silicon monocrystalline thin film on 3C–SiC epilayers deposited on (1 0 0)...
International audience
International audience