December 17, 2009 (v1)
Publication
This work deals with epitaxial growth of aluminium nitride (AlN) thin films on silicon substrates. Structural and optical properties of AlN grown by molecular beam epitaxy are studied depending on substrate orientation and surface preparation. The sound velocity of acoustic waves and piezoelectric coefficients e31 and d33 are also measured....
Uploaded on: December 4, 2022