M

J

MORENO LÓPEZ , José Manuel

Last name: MORENO LÓPEZ

First name: José Manuel

September 1, 2015 (v1)

Publication

Metadata-only

Characterisation of the fabrication process of freestanding SU-8 microstructures integrated in printing circuit board in microelectromechanical systems

Perdigones Sánchez, Francisco Moreno López, José Manuel Luque Estepa, Antonio

The characterisation of the fabrication process to develop freestanding SU-8 structures integrated in printing circuit board in microelectromechanical systems (PCBMEMS) technology is presented. SU-8 microcantilevers, microbridges, microchannels and micromembranes have been fabricated following the described procedure. Adherence between FR4...

Uploaded on: March 27, 2023