August 1, 2017 (v1)
Publication
Iron oxide thin films as hematite (α-Fe2O3) have been prepared by ion beam induced chemical vapor deposition. Very compact and dense films are obtained by this procedure. The thin films have been grown by ombardment of the substrate surfaces with O2+ ions or mixtures of O2+ and Ar+ ions, while a volatile precursor of iron [i.e., Fe(CO)5] is...
Uploaded on: December 4, 2022