2007 (v1)
Publication
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Uploaded on: March 31, 2023
R
Last name: R. BUZIO
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A quantitative surface reconstruction technique has been developed for the geometric characterization of three-dimensional structures by using a combined focused ion beam—scanning electron microscopy (FIB–SEM) instrument. A regular pattern of lines is milled at normal incidence on the sample to be characterized and an image is acquired at a...
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