RABBANI , F.

Intrinsic stress in amorphous hydrogenated carbon (a-C:H) coatings was reduced through addition of 10–20 sccm N2 to the feed gas. The compressive stresses observed in this study were in the range −0.91 to −1.6 GPa. Approximately 2–3 at.% nitrogen was incorporated into the coatings as determined using elastic recoil detection (ERD). Raman...

In this work we have studied the adhesion of PVD amorphous hydrogenated carbon (a-C:H) thin coatings (<200 nm) on crystalline silicon by means of positron beam analysis (PBA). PBA allows the study of the a-C:H layer and the interface by monitoring changes on the Doppler broadening parameters S and W. Depending on the deposition condition, using...