The epitaxial growth of Mg 3 N 2 thin films by molecular beam epitaxy has been recently achieved. This work presents the structural properties of the films, including grains sizes and lattice rotations, as assessed by x-ray diffraction and transmission electron microscopy. The films' microstructure consists of well-aligned columnar grains 10 nm...
-
March 7, 2021 (v1)Journal articleUploaded on: December 3, 2022
-
December 18, 2023 (v1)Journal article
Superconducting nanowire single photon detectors (SNSPDs) made with thin NbN films can reach high performances. While sputtering has been the deposition method of choice, here, we show that ammonia-molecular beam epitaxy (NH3-MBE) can produce pertinent epitaxial cubic NbN thin films on silicon substrates using an AlN buffer. Despite granular...
Uploaded on: January 13, 2025 -
May 11, 2020 (v1)Journal article
Single-crystalline Mg 3 N 2 thin films are grown on MgO (100) substrates with plasma-assisted molecular beam epitaxy. To prevent the oxidation of the Mg 3 N 2 films and allow further physical characterization, a polycrystalline MgO cap is deposited in situ. The growth orientation of the Mg 3 N 2 films can be tuned from (100) to (111) by...
Uploaded on: December 4, 2022 -
2021 (v1)Journal articleEpitaxial Zn3N2 thin films by molecular beam epitaxy: Structural, electrical, and optical properties
Single-crystalline Zn3N2 thin films have been grown on MgO (100) and YSZ (100) substrates by plasma-assisted molecular beam epitaxy. Depending on growth conditions, the film orientation can be tuned from (100) to (111). For each orientation, x-ray diffraction and reflection high-energy electron diffraction are used to determine the epitaxial...
Uploaded on: June 21, 2023 -
2021 (v1)Journal articleEpitaxial Zn3N2 thin films by molecular beam epitaxy: Structural, electrical, and optical properties
Single-crystalline Zn3N2 thin films have been grown on MgO (100) and YSZ (100) substrates by plasma-assisted molecular beam epitaxy. Depending on growth conditions, the film orientation can be tuned from (100) to (111). For each orientation, x-ray diffraction and reflection high-energy electron diffraction are used to determine the epitaxial...
Uploaded on: December 3, 2022 -
August 14, 2021 (v1)Journal article
International audience
Uploaded on: December 4, 2022