June 20, 2023 (v1)
Publication
This paper is focused on the sputtering process and on the structure, chemical composition and mechanical properties of coatings consisting of Al\O dielectric matrix incorporated with increasing Au contents. The maximum Au content incorporated in the coatings was 9 at.%. Al was in deficient values in relation to the Al2O3 compound. Al\O matrix...
Uploaded on: June 21, 2023