S

A

SCHENEIDER , A.

Last name: SCHENEIDER

First name: A.

July 8, 2020 (v1)

Publication

Metadata-only

Preliminary experiments for the fabrication of thermally actuated bimorph cantilever arrays on non-silicon wafers with vertical interconnects

Serra, S.G. Rozynek, Z. Almansa, A.

This paper describes the first steps for the fabrication of low-cost cantilever arrays, developed at RAL, on non-silicon polymer substrates with vertical interconnects, produced at Profactor. The deflection and actuation of these cantilevers is based on the bimorph thermal actuation principle. The fabrication of the cantilever arrays requires...

Uploaded on: December 4, 2022