This paper demonstrates the ability of 3CSiC microcantilevers (μCs) to monitor binary gas mixture without sensitive coating. Here, 3CSiC is chosen in particular, as the newly designed sensor will be placed in a radioactive environment. The change in gas concentration is identified using relative shifts in the cantilever's mechanical resonance...
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October 24, 2021 (v1)Conference paperUploaded on: December 3, 2022
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April 24, 2022 (v1)Conference paper
The H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring physical properties of the gas (mass density, viscosity, sound velocity and sound absorption) without requiring any sensitive layer....
Uploaded on: December 4, 2022