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TELESIO , Francesca

Last name: TELESIO

First name: Francesca

2016 (v1)

Publication

Metadata-only

Nanopatterning process based on epitaxial masking for the fabrication of electronic and spintronic devices made of La0.67Sr0.33MnO3/LaAlO3/SrTiO3 heterostructures with in situ interfaces

TELESIO, FRANCESCA MARRE', DANIELE Pellegrino, Luca

The fabrication of oxide electronics devices is presently hindered by the lack of standardized and well established patterning procedures, applicable down to the nanoscale. In this work, the authors propose a procedure to obtain patterns with resolution around 100 nm on (La,Sr)MnO3/LaAlO3/SrTiO3 heterostructures. Our method is based on a...

Uploaded on: April 14, 2023