T
G
Last name: TEYSSEDRE
First name: G.
International audience
A new concept concerning dielectric engineering is presented in this study aiming at a net improvement of the performance of dielectric layers in RF MEMS capacitive switches with electrostatic actuation and an increase of their reliability. Instead of synthesis of new dielectric materials, we have developed a new class of dielectric layers that...
New dielectric-engineering concept is developed intending a net improvement of the performance of dielectric layers under electrical stress. Instead of synthesis of new dielectric materials a new class of dielectric layers that gain their performance from design rather than from composition is established. Two kinds of nanostructured dielectric...
The proposed approach in this contribution concerns plasma deposition processes for engineering of multifunctional materials. It opens the way for transition from material level of development to system level of applications. This concept is applied for deposition of nanocomposite thin layers comprising a single layer of silver nanoparticles...