T

A

THOMANN , Anne Lise

Last name: THOMANN

First name: Anne Lise

June 28, 2023 (v1)

Publication

Metadata-only

Microstructural characterization and thermal stability of He charged amorphous silicon films prepared by magnetron sputtering in helium

Fernández Camacho, Asunción Sauvage, Thierry Diallo, Babacar

Sputtering of silicon in a Helium magnetron discharge has been reported as a bottom-up procedure to obtain amorphous Si films containing high amounts of gas-filled nanopores. Here we compare the microstructure and composition of Si–He nanocomposite films deposited by magnetron sputtering (MS) with 4He in DC or RF and 3He in RF operation modes....

Uploaded on: July 1, 2023