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TOLEDANO , Diana

Last name: TOLEDANO

First name: Diana

June 20, 2023 (v1)

Publication

Metadata-only

Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: effect on the refractive index

Toledano, Diana Escobar-Galindo, Ramón Yuste, Miriam

In this work, we report the successful growth of ZnO nanostructured films by oblique angle magnetron sputtering deposition (OAD) from a Zn target in a mixture gas of Ar/O2. The film microstructure and the surface morphology of the samples were explored by HRSEM. The crystalline structure and the composition were determined by XRD and RBS,...

Uploaded on: June 21, 2023