2009 (v1)
Publication
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Uploaded on: March 31, 2023
V
Last name: V. MUSSI
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We exploit the fabrication capabilities of the Ultra High Resolution Field Emission Scanning Electron Microscopy (UHR-FE-SEM) and Focused Ion Beam (FIB), model CrossBeam® 1540XB by Zeiss, equipped with EDX, GIS, and STEM modules, in order to mill a silicon master for a first step of a wider project of designing, developing, and producing of...