A systematic study for the optimization of the deposition process of ZnO thin films grown by dc magnetron sputtering at room temperature was carried out using different oxygen partial pressures and deposition times. We have established a correlation between the oxygen partial pressure, the chemical composition and the crystalline structure of...
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June 21, 2023 (v1)PublicationUploaded on: June 23, 2023
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June 20, 2023 (v1)Publication
In this work, we report the successful growth of ZnO nanostructured films by oblique angle magnetron sputtering deposition (OAD) from a Zn target in a mixture gas of Ar/O2. The film microstructure and the surface morphology of the samples were explored by HRSEM. The crystalline structure and the composition were determined by XRD and RBS,...
Uploaded on: June 21, 2023 -
June 21, 2023 (v1)Publication
Low-emissivity (low-e) coatings on glass are nowadays extensively used for energy saving applications in architectural windows and on solar thermal collectors. In this work the feasibility of TiN-based layers as low-e coatings has been studied. TiN samples were deposited by reactive magnetron sputtering and, in order to improve their optical...
Uploaded on: June 23, 2023 -
June 23, 2023 (v1)Publication
We have investigated the relation between the structure and morphology of TiN coatings with their optical properties. Samples were deposited by magnetron sputtering and, by changing the deposition parameters, different textures and chemical compositions can be obtained as measured by X-ray diffraction and glow discharge optical emission...
Uploaded on: June 24, 2023 -
June 20, 2023 (v1)Publication
XANES and RBS were used to explore the structural phase and composition transitions of ultrathin films with Ti(12x)Zn2xO2 stoichiometries, from very low (y0.5 at.%) to high (y25 at.%) titanium content. In this way, the coordination chemistry of Ti4+ and Zn2+ cations was examined for a wide range of oxide compositions
Uploaded on: June 21, 2023 -
March 2, 2020 (v1)Publication
ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherford backscattering spectroscopy (RBS), X-ray...
Uploaded on: March 27, 2023