Published 2009 | Version v1
Journal article

In-plane polarities of nonpolar wurtzite epitaxial films deposited on m- and r-plane sapphire substrates

Description

The in-plane polarities of GaN and ZnO non-polar films deposited on r - and m-sapphire are compared. The polarity is unique on r-sapphire and mixed on m-sapphire because the direction on the substrate surface parallel to the wurztite c-direction is polar in the first case and nonpolar in the second case. Furthermore, on r-sapphire where GaN and ZnO have a unique polarity, the directions of the polar c-axis relative to a reference sense in the substrate surface are opposite for both materials. This difference may be related to the nitridation which is the first step of the of III-nitride growth.

Additional details

Created:
December 4, 2022
Modified:
November 28, 2023