Characterization of unintentional doping in localized epitaxial GaN layers on Si wafers by scanning spreading resistance microscopy

Creators: Kaltsounis, Thomas; Haas, Helge; Lafossas, Matthieu; Torrengo, Simona; Maurya, Vishwajeet; Buckley, Julien; Mariolle, Denis; Veillerot, Marc; Gueugnot, Alain; Mendizabal, Laurent; Cordier, Yvon; Charles, Matthew

Others:: Université Grenoble Alpes, CEA, Leti, F-38000, Grenoble, France; Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA)

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