Published October 23, 2019 | Version v1

Journal article Metadata-only

The Effect of Inductively Coupled Plasma Etching on the I – V Curves of the Avalanche Photodiode with GaN/AlN Periodically Stacked Structure

Creators: Wu, Xingzhao; Wang, Lai; Hao, Zhibiao; Han, Yanjun; Sun, Changzheng; Xiong, Bing; Wang, Jian; Li, Hongtao; Luo, Yi; Brault, Julien; Khalfioui, Mohamed Al; Nemoz, Maud; Li, Mo; Kang, Jianbin; Li, Qian

Others:: Université Côte d'Azur (UCA); Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS) ; COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA)

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Created:: December 4, 2022
Modified:: November 30, 2023