Published 2022
| Version v1
Journal article
Low-loss GaN-on-insulator platform for integrated photonics
- Others:
- Centre de Nanosciences et Nanotechnologies (C2N (UMR_9001)) ; Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)
- Centre de Nanosciences et de Nanotechnologies (C2N) ; Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)
- Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS) ; COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA)
Description
III-Nitride semiconductors are promising materials for on-chip integrated photonics. They provide a wide transparency window from the ultraviolet to the infrared that can be exploited for second-order nonlinear conversions. Here we demonstrate a photonics platform based on epitaxial GaN-on-insulator on silicon. The transfer of the epi-material on SiO 2 is achieved through wafer bonding. We show that quality factors up to 230 000 can be achieved with this platform at telecommunication wavelengths. Resonant second harmonic generation is demonstrated with a continuous wave conversion efficiency of 0.24%/W.
Abstract
International audience
Additional details
- URL
- https://hal.archives-ouvertes.fr/hal-03681050
- URN
- urn:oai:HAL:hal-03681050v1
- Origin repository
- UNICA