Published July 2020 | Version v1

Journal article Metadata-only

Photoassisted chemical smoothing of AlGaN surface after laser lift-off

Creators: Zheng, Zhongming; Long, Hao; Matta, Samuel; Leroux, Mathieu; Brault, Julien; Ying, Leiying; Zheng, Zhiwei; Zhang, Baoping

Others:: Xiamen Univ, Optoelect Engn Res Ctr, Dept Elect Engn, Xiamen, Peoples R China.; Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS) ; COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA); Centre National de la Recherche Scientifique (CNRS); Department of Hydraulic Engineering [Tianjin] (DHE) ; Tianjin Agricultural University (TJAU)

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International audience

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Created:: December 4, 2022
Modified:: December 1, 2023