On the calibration of a SPAD-based 3D imager with in-pixel TDC using a time-gated technique

The optical characterization of a CMOS 64×64 single-photon avalanche-diode (SPAD) array with in-pixel 11b time-to-digital converter (TDC) is presented. The overall full-width half-maximum (FWHM) of the detector ensemble SPAD plus TDC is 690ps. The sensor has been fabricated in a 0.18μm standard CMOS technology which features an average dark-count rate (DCR) of 42kHz at 1V excess voltage (V e ) and room temperature. The detector successfully uses its time-gating capability to mitigate this large amount of noise enabling the sensor for accurate time-of-flight (ToF) measurements. The effectiveness of the time-gating technique is experimentally demonstrated. According to measurements, a time window of 400ns is enough to ensure that the TDC is triggered by light rather than by spurious events.