Published May 29, 2023
| Version v1
Conference paper
Thin-film blue light-emitting diodes for flexible device operation down to a millimetric radius of curvature
Contributors
Others:
- Centre de Nanosciences et de Nanotechnologies (C2N) ; Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)
- Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UniCA)
- Georgia Tech Lorraine [Metz] ; Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC) ; Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)
Description
We report on the fabrication and characterization of flexible blue thin-film micro-LED grown by MOVPE.Two approaches are explored to replace laser lift-off for the micro-LED device liberation from the growth substrate:the release of the micro-LED structures assisted by quasi-van der Waals epitaxy using an interfacial h-Bn layer; andthe sacrificial etching of the growth substrate starting from LED structures on Si(111). We demonstrate the transferof micro-LED on a polyimide substrate and their operation down to a millimetric radius of curvature.
Abstract
International audienceAdditional details
Identifiers
- URL
- https://hal.science/hal-04683266
- URN
- urn:oai:HAL:hal-04683266v1
Origin repository
- Origin repository
- UNICA