Thin-film blue light-emitting diodes for flexible device operation down to a millimetric radius of curvature

Creators: Duraz, Jules; Cambril, Edmond; Herth, Etienne; Frayssinet, Éric; Damilano, Benjamin; Sundaram, Suresh; Vuong, Phuong; Patriarche, Gilles; Ougazzaden, Abdallah; Tchernycheva, Maria; Bouchoule, Sophie

Others:: Centre de Nanosciences et de Nanotechnologies (C2N) ; Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS); Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UniCA); Georgia Tech Lorraine [Metz] ; Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC) ; Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

Description

We report on the fabrication and characterization of flexible blue thin-film micro-LED grown by MOVPE.Two approaches are explored to replace laser lift-off for the micro-LED device liberation from the growth substrate:the release of the micro-LED structures assisted by quasi-van der Waals epitaxy using an interfacial h-Bn layer; andthe sacrificial etching of the growth substrate starting from LED structures on Si(111). We demonstrate the transferof micro-LED on a polyimide substrate and their operation down to a millimetric radius of curvature.

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Thin-film blue light-emitting diodes for flexible device operation down to a millimetric radius of curvature

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