Published February 2019 | Version v1

Journal article Metadata-only

Buried defects induced by plasma assisted molecular beam epitaxy of AlN and GaN on Silicon

Contributors

Other:

Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS) ; COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA)

International audience

Additional details

URL: https://hal.archives-ouvertes.fr/hal-02399328
URN: urn:oai:HAL:hal-02399328v1

Origin repository: UNICA

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Created: December 4, 2022
Modified: April 16, 2025