Published August 2005
| Version v1
Journal article
Anisotropy-induced polarization mixture of surface acoustic waves in Ga N ∕ c -sapphire heterostructures
Contributors
Others:
- Departamento de Ingeniería Electrónica and ISOM (ETSI Telecomunicacion) ; Universidad Politécnica de Madrid (UPM)-Ciudad Universitaria
- Institut d'Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN) ; Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)
- Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS) ; COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA)
Description
The characteristics of surface acoustic waves (SAWs) in GaN layers grown on c-plane sapphire are investigated. Besides Rayleigh mode, Sezawa and Love modes, which are confined in the nitride layers, arise because of the slow sound propagation in GaN compared with the substrate. In addition, pseudo-SAWs leaking into the bulk are observed. The trigonal crystal symmetry of sapphire not only leads to an anisotropic propagation of the SAWs in the heterostructures, despite the isotropic elastic properties in the c-plane GaN, but also mixes their polarization even for the propagation along high-crystal-symmetry directions. Love modes, which are normally piezoelectrically inactive, can be excited by interdigital transducers through this polarization mixture. The nonzero value of the elastic coefficient c14 of sapphire is indicated to be the origin of the coupling of sagittal and shear horizontal displacements.
Abstract
International audienceAdditional details
Identifiers
- URL
- https://hal.archives-ouvertes.fr/hal-02906694
- URN
- urn:oai:HAL:hal-02906694v1
Origin repository
- Origin repository
- UNICA