Published July 18, 2017 | Version v1
Publication

Influence of the angular distribution function of incident particles on the microstructure and anomalous scaling behavior of thin films

Description

The microstructure and the scaling properties of films grown by plasma enhanced chemical vapor deposition are reproduced with a discrete model that takes into account the angular distribution function of the particles and the lateral growth of the films. Both the experimental and simulated surfaces exhibit a granular microstructure and an anomalous scaling behavior characterized by values of the growth exponent β that vary with the scale of measurement. Depending on the angular distribution function used in the model, values of β ranging from 0.86 to 0.2 are obtained.

Additional details

Created:
March 27, 2023
Modified:
November 28, 2023