Published July 2019 | Version v1

Journal article Metadata-only

Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

Creators: Schilirò, Emanuela; Giannazzo, Filippo; Bongiorno, Corrado; Di Franco, Salvatore; Greco, Giuseppe; Roccaforte, Fabrizio; Prystawko, Pawel; Kruszewski, Piotr; Leszczyński, Mike; Krysko, Marcin; Michon, Adrien; Cordier, Yvon; Cora, Ildiko; Pécz, Bela; Gargouri, Hassan; Nigro, Raffaella Lo

Others:: Istituto per la Microelettronica e Microsistemi [Catania] (IMM) ; Consiglio Nazionale delle Ricerche (CNR); Institute of High Pressure Physics [Warsaw] (IHPP) ; Polska Akademia Nauk = Polish Academy of Sciences (PAN); Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS) ; COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA); Research Institute for Technical Physics and Materials Science (MFA) ; Hungarian Academy of Sciences (MTA)

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Created:: December 4, 2022
Modified:: December 1, 2023