Published June 9, 2019
| Version v1
Conference paper
Chemical Characterization of Amorphous Er-Doped Phase-Separated Dielectric Nano-Particles (DNPs) via Secondary Ion Mass Spectrometry (SIMS) Imaging
- Others:
- Carl ZEISS SMT Inc
- Carl Zeiss SMT Inc.
- Institut de Physique de Nice (INPHYNI) ; Université Nice Sophia Antipolis (1965 - 2019) (UNS) ; COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-COMUE Université Côte d'Azur (2015-2019) (COMUE UCA)-Centre National de la Recherche Scientifique (CNRS)-Université Côte d'Azur (UCA)
Description
International audience
Additional details
- URL
- https://hal.archives-ouvertes.fr/hal-02366880
- URN
- urn:oai:HAL:hal-02366880v1
- Origin repository
- UNICA