Comunidad Autónoma de Madrid (España) IND2017/IND-7668
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June 24, 2021 (v1)PublicationUploaded on: December 4, 2022
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October 3, 2019 (v1)Publication
The influence of one dimensional substrate patterns on the nanocolumnar growth of thin films deposited by magnetron sputtering at oblique angles is theoretically and experimentally studied. A well‐established growth model has been used to study the interplay between the substrate topography and the thin film morphology. A critical thickness has...
Uploaded on: December 4, 2022 -
March 18, 2022 (v1)Publication
It is demonstrated that, besides classical nanocolumnar arrays, the oblique angle geometry induces the growth of singular structures in the nanoscale when using wisely designed patterned substrates. Well-ordered array of crosses, cylindrical nanorods or hole structures arranged in square or hexagonal regular geometries are reported as examples,...
Uploaded on: December 4, 2022