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BUCHAILLOT , Lionel

Last name: BUCHAILLOT

First name: Lionel

2012 (v1)

Conference paper

Metadata-only

Résonateurs MEMS en nitrure de gallium

Faucher, Marc Theron, Didier Cordier, Yvon

National audience

Uploaded on: December 2, 2022
January 23, 2011 (v1)

Conference paper

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Gallium nitride approach for MEMS resonators with highly tunable piezo-amplified transducers

Faucher, Marc Cordier, Yvon Semond, Fabrice

The properties of a new class of electromechanical resonators based on GaN are presented. By using the two-dimensional electron gas (2-DEG) present at the AlGaN/GaN interface and the piezoelectric properties of this heterostructure, we use the R-HEMT (Resonant High Electron Mobility Transistor) as an active piezoelectric transducer up to 5MHz....

Uploaded on: December 3, 2022
2012 (v1)

Conference paper

Metadata-only

GaN MEMS resonators : from demonstration to microsystem-compatible performances

Faucher, Marc Ben Amar, Achraf Zhang, Victor

International audience

Uploaded on: December 3, 2022