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GIRAUD , E.

Last name: GIRAUD

First name: E.

2018 (v1)

Journal article

Metadata-only

Composition Metrology of Ternary Semiconductor Alloys Analyzed by Atom Probe Tomography

Di Russo, E. Moyon, F. Gogneau, N.

Ternary semiconductor alloys based on the AyB1-yC stoichiometry are widely employed in electronic devices and their composition plays a key role in bandgap engineering of heterostructures. We have studied the crucial issue of accuracy in composition measurements of AlyGa1-yN and MgyZn1-y O alloys by Atom Probe Tomography. The results indicate a...

Uploaded on: December 4, 2022
July 2016 (v1)

Journal article

Metadata-only

Assessing the Composition of Wide Bandgap Compound Semiconductors by Atom Probe Tomography: A Metrological Problem

Rigutti, L. Mancini, L. Di Russo, E.

International audience

Uploaded on: December 4, 2022