GONZÁLEZ ELIPE , A. R.

Last name: GONZÁLEZ ELIPE

First name: A. R.

February 8, 2016 (v1)

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Dielectric breakdown of SiO2 thin films deposited by ion beam induced and plasma enhanced CVD

Barranco Quero, Ángel Jiménez Marín, Alfonso Frutos Rayego, Fabián

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Uploaded on: March 24, 2023
June 13, 2023 (v1)

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Stoichiometric Control of SiOx Thin Films Grown by Reactive Magnetron Sputtering at Oblique Angles

García Valenzuela, Aurelio Álvarez, Rafael López Santos, Carmen

The deposition of SiOx (x < 2) compound thin films by the reactive magnetron sputtering technique at oblique angles is studied from both theoretical and experimental points of view. A simple mathematical formula that links the film stoichiometry and the deposition conditions is deduced. Numerous experiments have been carried out to test this...

Uploaded on: June 15, 2023
October 10, 2019 (v1)

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Influence of plasma-generated negative oxygen ion impingement on magnetron sputtered amorphous SiO2 thin films during growth at low temperatures

Macías Montero, Manuel Jesús García-García, Francisco J. Álvarez Molina, Rafael

Growth of amorphous SiO2 thin films deposited by reactive magnetron sputtering at low temperatures has been studied under different oxygen partial pressure conditions. Film microstructures varied from coalescent vertical column-like to homogeneous compact microstructures, possessing all similar refractive indexes. A discussion on the process...

Uploaded on: March 27, 2023
February 8, 2016 (v1)

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Function generator to study the dielectric breakdown in thin film structures

Jiménez Moreno, Gabriel Frutos Rayego, Fabián González Elipe, A. R.

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Uploaded on: December 4, 2022

GONZÁLEZ ELIPE , A. R.

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