March 2005 (v1)
Journal article
Strategies for maintaining a low threading dislocation density in highly resistive GaN layers grown by MOVPE on sapphire or SiC substrates using Fe modulation doping are presented. Sheet resistances as high as 1E+8 Ω□ for dislocation densities lower than 8E+8 /cm² have been obtained. 2DEGs created at the AlGaN/GaN:Fe interface have good...
Uploaded on: December 4, 2022