were deposited on flat substrates by physical vapor deposition in a glancing angle configuration. The particles were characterized by scanning electron microscopy and atomic force microscopy and their optical properties examined by UV–vis absorption spectroscopy using linearly polarized light. It was found that, depending on the amount of...
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November 13, 2015 (v1)PublicationUploaded on: December 4, 2022
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January 19, 2018 (v1)Publication
The growth of nanostructured physical vapor deposited thin films at oblique angles is becoming a hot topic for the development of a large variety of applications. Up to now, empirical relations, such as the so-called tangent rule, have been uncritically applied to account for the development of the nanostructure of these thin films even when...
Uploaded on: December 4, 2022 -
March 5, 2019 (v1)Publication
The growth of Ti thin films by the magnetron sputtering technique at oblique angles and at room temperature is analysed from both experimental and theoretical points of view. Unlike other materials deposited in similar conditions, the nanostructure development of the Ti layers exhibits an anomalous behaviour when varying both the angle of...
Uploaded on: December 5, 2022 -
September 19, 2018 (v1)Publication
Oblique angle deposition (OAD) is a powerful technique for the fabrication of porous nanostructured oxide thin films. OAD films typically present a columnar tilted nanostructure due to geometrical shadowing effects during the thin film growth. In this work, we study the fabrication of transparent and conducting indium tin oxide films (ITO) by...
Uploaded on: March 27, 2023 -
February 25, 2020 (v1)Publication
Based on an already tested laboratory procedure, a new magnetron sputtering methodology to simultaneously coat two-sides of large area implants (up to ~15 cm2) with Ti nanocolumns in industrial reactors has been developed. By analyzing the required growth conditions in a laboratory setup, a new geometry and methodology have been proposed and...
Uploaded on: December 5, 2022 -
October 3, 2019 (v1)Publication
The influence of one dimensional substrate patterns on the nanocolumnar growth of thin films deposited by magnetron sputtering at oblique angles is theoretically and experimentally studied. A well‐established growth model has been used to study the interplay between the substrate topography and the thin film morphology. A critical thickness has...
Uploaded on: December 4, 2022