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STRENGER , C.

Last name: STRENGER

First name: C.

January 22, 2018 (v1)

Publication

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Compositional characterization of SiC-SiO2 interfaces in MOSFETs

Beltrán, Ana M. Schamm-Chardon, Sylvie Mortet, Vincent

In the context of the MobiSiC project (Mobility engineering for SiC devices) we study 4H-SiC MOSFETs with the aim to get more insight in the C distribution and nature across the SiC-SiO2 interface and to correlate the results with electron mobility measurements. Investigations are based on the combination of structural and compositional...

Uploaded on: March 25, 2023
February 23, 2018 (v1)

Publication

Metadata-only

MS-3-P-5702 Nanoanalytical investigations at the interface of 4H-SiC/SiO2 MOSFETs [Póster]

Tan, H. Beltrán, Ana M. March, K.

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Uploaded on: March 25, 2023