CAMASSEL , Jean

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We study the influence of the growth conditions on the residual strain and related optical and structural properties in the case of 3C-SiC films grown on (001) silicon substrates. We show that two possible mechanisms compete to manage the final sample bow: one is by controlling the composition of the gaseous phase (C/Si ratio) the other one by...

Raman Investigation of Heavily Al Doped 4H-SiC Layers Grown by CVD

While the integration of graphene on semiconductor surfaces is important to develop new applications, epitaxial graphene has only been integrated on SiC substrates or 3C-SiC/Si templates. In this work, we explore the possibility of growing graphene on AlN/Si(111) templates. Using a chemical vapor deposition process with propane as the carbon...

The present work is proposing a comparative analysis of the graphitization, achieved by argon-propane assisted chemical vapor deposition, of 6H-SiC(0001) bulk substrates and 3C-SiC heteroepilayers deposited on (111) and (100) silicon. We have investigated the influence of the experimental parameters of the graphitization (pressure, propane flow...

We have grown graphene on SiC(0001) using propane-hydrogen CVD. In this work, we present the effects of growth pressure and temperature on structural and electrical properties. Structural characterizations evidence the formation of graphene with in-plane rotational disorder, except for low growth pressure and high growth temperature which lead...

International audience

The structural, optical, and transport properties of graphene grown by chemical vapor deposition (CVD) of propane under hydrogen on the Si face of SiC substrates have been investigated. We show that little changes in temperature during the growth can trigger the passivation of the SiC surface by hydrogen. Depending on the growth condition, hole...